Organizer: TU Ilmenau
Vice President for Research Prof. Stefan Sinzinger,
Prof. Eberhard Manske, TU Ilmenau
Welcome Address and Introduction
Dr. Peter de Groot - Zygo/ USA
The turbulent history of high precision interferometry
Abstract
Dr. Andrew Yacoot - National Physical Laboratory NPL/ UK
X-ray interferometry for dimensional nanometrology
Abstract
Dr. Jochen Hetzler - Carl Zeiss SMT GmbH
Picometer Interferometry - the Heart of Digitalization
Abstract
Dr. Virpi Korpelainen - National Metrology Institute VTT MIKES/ Finland
Interferometry in length metrology at VTT MIKES
Abstract
Midday Break and Poster Session
Dr. Arnold Nicolaus - Physikalisch-Technische Bundesanstalt PTB
From transmission spheres to silicon spheres to Planck's constant to a constant kilogram
Abstract
Dr. Rainer Krug - Renishaw GmbH
Laser interferometry - established technology in the machine tool industry
Abstract
Coffee Break
Dr. Michael Matus - BEV Federal Office of Metrology and Surveying/ Austria
From Michelson to the Mise en Pratique
Abstract
Dr. Damien Kelly - The Institute for Laser Technologies in Medicine and Metrology at the University of Ulm (ILM)
Phase Retrieval – an alternative theoretical analysis
Abstract
Closing Remarks
Opening of the Labs and Demonstrations