X-ray interferometry for dimensional nanometrology

Andrew Yacoot
National Physical Laboratory, Teddington Middlesex TW11 0LW UK
andrew.yacoot@npl.co.uk

In 2019 when the International System of Units was updated, a secondary realisation of the metre based on the lattice parameter of silicon was introduced to support emerging requirements for dimensional nanometrology. One of the three routes to traceability via the silicon lattice that was formally recognised was x-ray interferometry. The talk will introduce x-ray interferometry and explain how it can be used as a sub-nanometre positioning system and ruler to measure sub-nanometre errors in interferometer systems.
Andrew Yacoot is the Principal Scientist leading the dimensional nanometrology work at the National Physical Laboratory, the UK’s national metrology institute. His areas of research include, optical interferometry, x-ray interferometry, metrological atomic force microscopy and nanopositioning. He chairs the Consultative Committee for Length’s Working Group on Dimensional Nanometrology (CCL-WG-N) and is Editor-in-Chief for the Institute of Physics journal Measurement Science and Technology.